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Vertical Heat Treatment System VF-5900

Model VF-5900 / JTEKT Corporation (Official website) / Listed on page 1 of the document

300 mm wafer vertical heat treatment system supporting various processes including oxidation, diffusion, and LP-CVD.

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Vertical Heat Treatment System VF-5900 on page 1 of JTEKT Corporation "半導体製造工程内で活用できる製品シリーズ ①②"
Source: JTEKT Corporation「半導体製造工程内で活用できる製品シリーズ ①②」page 1
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Specifications

Compatible Wafer Diameter 300 mm

Features

  • Clean-compatible
  • 300 mm wafer compatible

Applications

  • Oxidation
  • Diffusion
  • LP-CVD

FAQ

Q. What processes can the VF-5900 be used for?
A. It is a vertical heat treatment system supporting various processes including oxidation, diffusion, and LP-CVD.
Q. What wafer diameter does the VF-5900 support, and what are its features?
A. It supports 300 mm wafers. It features clean compatibility.

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